Fabrication of Periodic AAO Films Pre-Patterned by Nanoimprint Technology
碩士 === 國立中央大學 === 光電科學研究所 === 96 === A nanoimprint system and multi-step anodization were applied to improve the arrangement of phosphoric acid type of anodic aluminum oxide (AAO). The proper anodizing parameter to match the period of the stamp mold was found out experimentally. After that, the AAO...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2007
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Online Access: | http://ndltd.ncl.edu.tw/handle/84705341366856460713 |