Novel Sol-Gel Derived Nonvolatile Nanocrystal Memory Devices
碩士 === 國立交通大學 === 奈米科技研究所 === 96 === In this thesis, the formation mechanism of nanocrystals (NCs) from the sol-gel spin-coating method had been studied. The ZrCl4, HfCl4, and SiCl4 were used as the sol-gel precursors to form the hafnium and zirconium silicate after high temperature annealing. We ev...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/33100000213882820042 |