A Study of Growth of ZnO Thin Films and Thin Film Transistors by Aqueous Method
碩士 === 國立交通大學 === 工學院碩士在職專班半導體材料與製程設備組 === 96 === In this study, we have developed a novel and environment-friendly aqueous method to deposit ZnO-based thin films, including ZnO, Zn1-xMgxO, and Zn1-xInxO material systems. For the first part, a new chemical solution has been synthesized for depositio...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/42276588111343088881 |