Assembly of Three Dimensional Microstructures on SOI Wafers Using SU-8 Mechanisms
碩士 === 國立交通大學 === 電機與控制工程系所 === 96 === Recently, the Micro Electro Mechanical Systems (MEMS) technology has many important developments with the rapid progress in the semiconductor industry. In many applications, there is demand for three-dimensional (3-D) structures. More effective assembly techniq...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2007
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/94368178834130857339 |