Improvement on pH-Sensing Device Constructed of IrO2 and Ta2O5 Films
碩士 === 國立交通大學 === 電子物理系所 === 96 === ISFET, Ion Sensitive Field Effect Transistor, was first proposed by Piet Bergveld in 1970 to have ion sensitivity and field-effect transistor components of micro-chemical sensors. The ISFET is in accordance with the process technology, MOSFET, and can be mass-prod...
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Format: | Others |
Language: | zh-TW |
Published: |
2008
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Online Access: | http://ndltd.ncl.edu.tw/handle/25544141179877598004 |