Reliability Investigation and Application of High Performance Ion-Sensitive Field Effect Transistors
博士 === 國立交通大學 === 電子工程系所 === 96 === This dissertation proposes to use zirconium oxide as a membrane of ion-sensitive field effective transistor (ISFET), and to control the effects of temperature and process deviation. When a stable sensitivity and intrinsic drift of SiO2 gate ISFET can be found, the...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2007
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Online Access: | http://ndltd.ncl.edu.tw/handle/80029062390039682802 |