Reliability Investigation and Application of High Performance Ion-Sensitive Field Effect Transistors

博士 === 國立交通大學 === 電子工程系所 === 96 === This dissertation proposes to use zirconium oxide as a membrane of ion-sensitive field effective transistor (ISFET), and to control the effects of temperature and process deviation. When a stable sensitivity and intrinsic drift of SiO2 gate ISFET can be found, the...

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Bibliographic Details
Main Authors: Kuo-Yi Chao, 趙高毅
Other Authors: Kow-Ming Chang
Format: Others
Language:en_US
Published: 2007
Online Access:http://ndltd.ncl.edu.tw/handle/80029062390039682802