A New Statistical Method for Automatic Partitioning Tools According to Engineers’ Tolerance Control in Process Improvement
博士 === 國立交通大學 === 統計學研究所 === 96 === In the semiconductor industry, tool comparison is a key task in the yield and the product quality enhancements. We developed a new method, called tolerance control partitioning (TCP), to automatically partition tools into several homogenous groups based on the rel...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45459257401117831628 |