The Study of Growth of Oriented Diamond Films by Bias Method
博士 === 國立交通大學 === 材料科學與工程系所 === 96 === Diamond films were synthesized on Si, Ge and SixGe1-x substrates by bias-enhanced nucleation in microwave plasma chemical vapor deposition. In this work, we have studied growth of oriented diamond films on various substrates by bias method. The dissertation is...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/39608676042514907783 |