Fabrication of Multiple Nano-Channel Thin Film Transistors by Nano Imprint Technology
碩士 === 國立暨南國際大學 === 電機工程學系 === 96 === In this thesis, the nano imprint technology was integrated with the traditional thin film transistor process. First, the multiple nano-channel thin film transistors was fabricated. The multiple nano-channel structures with the small line width and high density o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/69495672973505183604 |