Multi-layer growth CuAlO2 and effects of doping Fe2O3
碩士 === 國立成功大學 === 奈米科技暨微系統工程研究所 === 96 === In this study,we deposited CuAlO2 thin films on Al2O3(0001) substrate by ion beam sputter. The first work we deposited [CuO(10Å)/Al2O3(10Å)] multi-layers ,and 1100℃ annealed samples under argon ambience in order to get CuAlO2 thin films. The second work we...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99423827754407353441 |