GRNN-based Virtual Metrology
碩士 === 國立成功大學 === 製造工程研究所碩博士班 === 96 === In the semiconductor and TFT-LCD industries, virtual metrology system (VMS) can measure the quality of wafer or glass right after the process data is collected, and thus can reach the goal of real time wafer-to-wafer quality examination. The key of VMS is to...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/84403611111985464865 |