Fabrication and Package of Microfluidic Devices Using CMOS MEMS Process for Biomedical Applications
碩士 === 國立成功大學 === 電機工程學系碩博士班 === 96 === Coming with the improvement of CMOS (complementary metal-oxide-semiconductor) technology, many researchers imply CMOS fabrication into biology field. Enhanced circuits in bioMEMS (Biological micro-electro-mechanical systems) IC (Integrated circuit) create a ne...
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| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85953021465165572620 |