Grating Patterning on SOI Wafers Using AFM Lithography
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 96 === The theory is focused on the fabrication of grating structure on SOI(100) wafers using the method of AFM lithography. The grating patterning was a periodic structure of oxidation lines written on silicon surface using a voltage biased AFM nanoprobe. With the...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/63929824936726283514 |