Grating Patterning on SOI Wafers Using AFM Lithography

碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 96 === The theory is focused on the fabrication of grating structure on SOI(100) wafers using the method of AFM lithography. The grating patterning was a periodic structure of oxidation lines written on silicon surface using a voltage biased AFM nanoprobe. With the...

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Bibliographic Details
Main Authors: Jyun-Siang Lai, 賴俊翔
Other Authors: Tzong-Yow Tsai
Format: Others
Language:zh-TW
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/63929824936726283514