Grating Patterning on SOI Wafers Using AFM Lithography
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 96 === The theory is focused on the fabrication of grating structure on SOI(100) wafers using the method of AFM lithography. The grating patterning was a periodic structure of oxidation lines written on silicon surface using a voltage biased AFM nanoprobe. With the...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2008
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Online Access: | http://ndltd.ncl.edu.tw/handle/63929824936726283514 |