Silicon Waveguide Modulators Incorporating the Hybrid Structures of Junction Field-Effect Transistors (JFET) and p-i-n Diodes
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 96 === We have fabricated and characterized a Si-based optical waveguide modulator working at the wavelength of 1.55 μm. It consists of a joint version of JFET and p-i-n diode structures integrated with a silicon rib waveguide on epitaxial Si wafers. Besides, the o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/15274448837494195188 |