Investigation of High-Performance Compound Semiconductor Based Hydrogen Sensors
博士 === 國立成功大學 === 微電子工程研究所碩博士班 === 96 === In this dissertation, a series of high-performance compound semiconductor based hydrogen sensors, including Schottky diodes, field-effect resistors, and heterostructure field-effect transistors, are fabricated and studied. Pd and Pt are used as sensing metal...
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Format: | Others |
Language: | en_US |
Online Access: | http://ndltd.ncl.edu.tw/handle/78588104375859508057 |