Investigation of High-Performance Compound Semiconductor Based Hydrogen Sensors

博士 === 國立成功大學 === 微電子工程研究所碩博士班 === 96 === In this dissertation, a series of high-performance compound semiconductor based hydrogen sensors, including Schottky diodes, field-effect resistors, and heterostructure field-effect transistors, are fabricated and studied. Pd and Pt are used as sensing metal...

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Bibliographic Details
Main Authors: Ching-Wen Hung, 洪慶文
Other Authors: Wen-Chau Liu
Format: Others
Language:en_US
Online Access:http://ndltd.ncl.edu.tw/handle/78588104375859508057