A Study of Material Characteristics of Metal-Induced Poly-Silicon Crystallization
碩士 === 國立成功大學 === 航空太空工程學系碩博士班 === 96 === The objectives of this study are to induce poly-silicon crystallization on an amorphous-silicon thin film by using metal-induced method, and to investigate the effect of silicon-nitride thin film on the uniformity of crystallization. In the experiment, gold...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/79206520663432534332 |