Influence of Different Substrates and Surface Treatments on The Growth of SiC Nanowires
碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 96 === In this study, we synthesized silicon carbide nanowires (SiCNWs) by catalystic thermal chemical vapor deposition technique. Methane was used as the reaction gas along with hydrogen as carrier and dilution of methane gas. Silicon wafer was used as the substr...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/27588643995603100111 |