Focused Ion Beam-Based Fabrication of Arrayed Semiconductor Nanomaterials and Nanodevices
博士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 96 === In this research, we proposed a new technique for the fast fabrication of well-defined arrays of Si/GaN islands through an intentionally stigmated Ga+ focused ion beam (FIB) without masks, resists or etching. Stigmating and defocusing the ion beam resulted...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/98697898620575418966 |