Fabrication and application of polyimide plastic molds for imprinting lithography
碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 96 === Three different series of polyimide mold for nanoimprint were developed. Three kinds of polyimide precursors, poly(amic acid),were prepared from Pyromellitic dianhydride (PMDA), 4,4′-Oxydianiline (ODA), 4,4’- Hexafluoroisopropylidene diphthalic anhydride (6...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/42120721699767633980 |