| Summary: | 碩士 === 國立中興大學 === 機械工程學系所 === 96 === As the semi-conductor industry embraces into the 12 inch generation, a fully loaded 25 plate FOUP would weigh around 10kg. Therefore, manual labor in carrying these FOUP would no longer be sustainable. In considering the safety and efficiency of transportation as well as spatial consideration of the factory environment, the suspended Automated Material Handling System (AMHS) has become a necessity for 12 inch FAB transportation systems. Due to Taiwan been situated on an earthquake fault line, this research will focus on the physical analysis of the impact that an earthquake would have on an AMHS. The result of this analysis would provide enforcement methods to help ascertain a safe and robust AMHS.
The research would establish a connection of the suspended AMHS transportation belt from two 12 inch semi-conductor FAB. By applying ANSYS structure to the entire model and simulating earthquake forces accelerating in various directions, we would be able to analyze the entire structure and conditions of distortion and stress displacement. The results would show certain parts that are experiencing inadequate intensity levels and would be reinforced by suspensor rods to ascertain structural reinforcement.
After installing structural reinforcement, equivalent stress of suspensor rods have decreased from 458.062MPa to 190.743MPa, which is lower than the material stress capacity. The maximum shifting has decreased from 56.045mm to 28.817mm, which have decreased to half of the original. The maximum axis suppression stress is 33.191MPa, which is lower than the buckling intensity of the material. The above results have shown that suspended AMHS are safe and robust.
|
|---|
