The Analysis of the AMHS Hanging System for 300mm Wafer Fab
碩士 === 國立中興大學 === 機械工程學系所 === 96 === As the semi-conductor industry embraces into the 12 inch generation, a fully loaded 25 plate FOUP would weigh around 10kg. Therefore, manual labor in carrying these FOUP would no longer be sustainable. In considering the safety and efficiency of transportation as...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/97755731985510599693 |