Study on Process and Fabrication of a Thermal Infrared Microemitter
碩士 === 國立高雄應用科技大學 === 光電與通訊研究所 === 96 === The purpose of this thesis is to fabricate a thermal infrared microemitter on a <111>-oriented silicon wafer. We design various single heaters, such as micro-hotplates and microbridges, and heater arrays in this study. In our design, heavy N+ -doped si...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/76228761351584142503 |