Low pressure annealing improve in AZO films by an in-line DC sputter
碩士 === 崑山科技大學 === 電機工程研究所 === 96 === For evaluating the possibility to improve the electrical and optical properties on aluminum doped zinc oxide (AZO) films with annealing, a series of low pressure annealing on AZO films prepared by in line direct circuit sputtering was made. Vacuum annealing was t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/v52864 |