Study of vibration mode correlated electrical conductance in nanopillar transistor
碩士 === 義守大學 === 電子工程學系碩士班 === 96 === We use cross structure to realize nanopillars single electron transistor. The quantum dot is a multi-layer of Si3N4 /Poly-Si /Si3N4, and the thickness is 3nm /3nm /3nm respectively. We treat the thin film growth and the program of etching, and the influence of ov...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41520536165945119184 |