A study of metal nitride gate electrodes with tunable work function
碩士 === 清雲科技大學 === 電子工程系所 === 96 === The Metal-Oxide-Semiconductor Field-Effect Transistor (MOSFET) needs to use the metal gate to improve the efficiency in next generation. However, to choose a proper work function of metal gate is a crucial challenge. In this report, we try to use metal nitride ins...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/06271310065903328298 |