Low Cost Vertical-scanning System for White Light Interferometer
碩士 === 中原大學 === 機械工程研究所 === 96 === PZT is generally used in the scanning system of white light interferometer, but it takes time to reach the exact position as it uses precise movement feedback control. During vertical scanning the CCD camera needs to wait for PZT to be steady and capture the image....
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53185226826356429796 |
| Summary: | 碩士 === 中原大學 === 機械工程研究所 === 96 === PZT is generally used in the scanning system of white light interferometer, but it takes time to reach the exact position as it uses precise movement feedback control. During vertical scanning the CCD camera needs to wait for PZT to be steady and capture the image. This phenomenon limits the Frame per second (FPS) of CCD and makes the time of metrology too long.
The aim of this research is to develop a high speed and low cost vertical scanning system for white light interferometer. To reduce the cost of the system, stepping motor controlled by microcontroller used in the developed design for vertical movement. Another microcontroller is used to pick up the signal from the driver circuit of stepping motor and trigger the CCD camera to capture the image. This increase the FPS of CCD camera as the motor can run continually.
The resolution and total scan distance of system are determined to be 20nm and 20mm respectively. The developed design can reduce the cost by 33% and increases the CCD camera sampling rate to 1000 FPS.
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