Low Cost Vertical-scanning System for White Light Interferometer
碩士 === 中原大學 === 機械工程研究所 === 96 === PZT is generally used in the scanning system of white light interferometer, but it takes time to reach the exact position as it uses precise movement feedback control. During vertical scanning the CCD camera needs to wait for PZT to be steady and capture the image....
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53185226826356429796 |