Study on Diamond-like Carbon coatings with nitrogen dopant in Micro/Nano Tribology
碩士 === 建國科技大學 === 自動化工程系暨機電光系統研究所 === 96 === In this study, the DLC coatings were prepared using the closed field unbalanced magnetron sputtering method. The Micro/Nano Test was employed to measure the coating properties of micro/nano -tribology. With the micro/nano Test, the Pin On Disc is used to...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/34666114415976929914 |