The Stress Analysis of Strained-Si MOSFETs with Package Induced Stress

碩士 === 中華大學 === 機械工程學系碩士班 === 96 === The process-induced strained silicon device technology for enhancing the performance of the devices in the transistor is being adopted by the semiconductor industry nowadays, and it is called “strained engineering”. However, most researches are only limited on th...

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Bibliographic Details
Main Author: 林一宏
Other Authors: 陳精一
Format: Others
Language:zh-TW
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/64179591524988766652