Development of plasma system and characteristic analysis
碩士 === 長庚大學 === 機械工程研究所 === 96 === In our research, a real-time monitoring system for plasma diagnosis is developed, which combines a Langmuir probe and multi-channel optical emission spectroscopy (OES). Using this system, the physics properties (electrical temperature, plasma density) and the che...
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| Format: | Others |
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2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/bdfv2b |