On the Planarization Mechanism of the Soft Pad Polishing：From Mechanical Property Characterization to Theoretical Modeling
碩士 === 國立中正大學 === 機械工程所 === 96 === Soft pad polishing is a key technology for fine surface finish and planarization. Archaeological evidence suggests that the history of soft pad polishing dates back to the New Stone Age. In recent decades, there is a fast development of polishing technology and mac...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
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2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/21890757431308537957 |