Study of Fan Filter Unit Operating Speed for Energy Saving in Clean Rooms
碩士 === 元智大學 === 機械工程學系 === 95 === TFT-LCD industry is a very competitive industry.Every company must keep the production rate and to reduce the running cost. Therefor it is more and more important in cost reduction. This research includes two part, First Fan filter unit machine (FFU) performance tes...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/49073926999258594971 |