Adaptive Adjustment Scheme of Time-Varying Metrology Delay using RLS-type Controllers
碩士 === 元智大學 === 工業工程與管理學系 === 95 === RtR control technique has received tremendous interest, such as on-line quality control, in semiconductor manufacturing industry. The well-known methods are EWMA, dEWMA, and RLS controllers. It is often the case that a significant delay exists between a process r...
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| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/08619127028657368353 |