| Summary: | 碩士 === 國立雲林科技大學 === 環境與安全工程系碩士班 === 95 === This research utilized CFD based 3D gas explosion and fire simulation software, FLACS, to assess the hazard degree of hydrogen leak of simulating the fire, explosion within the epi process of an 8” semiconductor fab. Through their 3D dynamic property, FLACS can be used to assess the hazardous degree of chemical leakage for factory buildings or personnel, therefore let user easily understand the influence of the explosion pressure on the building structure and the thermal radiation temperature change that affected by the flame. Study shows that the hazardous range and level will be influenced effectively when the following parameters, such as gas leakage environment （confinement and congestion）, vapor cloud size, and ignition time etc., have been changed. This research also utilized FLACS simulation to study the effectiveness of the hazard mitigation equipment （e.g. pressure relief gate and water mist for explosion suppression） and further discussed whether the hazardous range caused by the fire and explosion can be reduced in order to diminish the hazard impingement on the equipment and personnel.
On the other hand, the traditional risk analysis technique can only calculate the risk value of equipment and personnel in a 2D format and unable to consider the risk impact on different height, this research utilized a self-developed 3D risk analysis technique to assess the death probability of personnel in a fab building that caused by the specific hazardous incident. The purpose of the study is to let the administrator can implement a proper incident analysis based on possible hazardous factors before any accident happens, and to establish the possible preventive and controlling countermeasure in order to reduce the personal risk to an acceptable level. It is foreseeable the company’s continuous management environment can be maintained and the plant safety can be secured via implementing the risk analysis technique with the preventive control strategies.
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