Three-Dimensional Risk Analysis Technique Apply on the Fire Explosion and Loss Prevent in a Semiconductor Factory
碩士 === 國立雲林科技大學 === 環境與安全工程系碩士班 === 95 === This research utilized CFD based 3D gas explosion and fire simulation software, FLACS, to assess the hazard degree of hydrogen leak of simulating the fire, explosion within the epi process of an 8” semiconductor fab. Through their 3D dynamic property, FLACS...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95976242413349290652 |