| Summary: | 碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 95 === Piezoelectric valveless micropumps investigated in the present study are manufactured for single-chamber and serial double-chamber structures via dry etching, anodic bonding, and laser beam machining processes. The conventional nozzle/diffuser micro-pumps are compared with those having V-shape flow resistances on the performance of pumping flow rate.
We present an investigation of the flow directing properties of micromachined diffuser and V-shape resistance. This is experimented on the voltage 100V and different frequency, we get 2.645ml/min for diffuser/nozzle in the voltage 100V and frequency 400Hz and 2.255ml/min for V-shape resistance in the voltage 100V and frequency 400Hz.
About series-wound two chambers, we get maximum flow rate 2.91ml/min for diffuser/nozzle in the voltage 100V, frequency 500Hz and phase difference 120°, Piezoelectric buzzer displacement effect flow rate. But V-shape resistance effect on the same parameter, piezoelectric buzzer displacement don’t affect flow rate.
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