Design and Analysis of MicroChannels for Valveless Piezoelectric Micropumps Subject to Series Combinations
碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 95 === Piezoelectric valveless micropumps investigated in the present study are manufactured for single-chamber and serial double-chamber structures via dry etching, anodic bonding, and laser beam machining processes. The conventional nozzle/diffuser micro-pumps are...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80739802775253150836 |