Construction of A Simulation Platform and Dispatching Rules of Diffusion, Litho and Wet for 300" DRAM Fab

碩士 === 國立雲林科技大學 === 工業工程與管理研究所碩士班 === 95 === DRAM manufacturing is an industry of marketing circle. It has the low and high season over and over. Plus, the shortening of production cycle time and the renewal of the manufacturing technique rapidly would make the manufacture environment more complex....

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Bibliographic Details
Main Authors: Wen-chih Huang, 黃文志
Other Authors: Ming-jian Yuan
Format: Others
Language:zh-TW
Published: 2007
Online Access:http://ndltd.ncl.edu.tw/handle/35426517239395047874