Construction of A Simulation Platform and Dispatching Rules of Diffusion, Litho and Wet for 300" DRAM Fab
碩士 === 國立雲林科技大學 === 工業工程與管理研究所碩士班 === 95 === DRAM manufacturing is an industry of marketing circle. It has the low and high season over and over. Plus, the shortening of production cycle time and the renewal of the manufacturing technique rapidly would make the manufacture environment more complex....
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2007
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Online Access: | http://ndltd.ncl.edu.tw/handle/35426517239395047874 |