Fabrication of AlN thin films by RF magnetron sputtering method and their surface acoustic wave applications
碩士 === 大同大學 === 光電工程研究所 === 95 === Recently, most communication devices which are developing toward high frequency have become important. The high frequency surface acoustic wave (SAW) devices are one of them. High frequency SAW devices must have some properties such as large eletro-mechanical coupl...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/khqgq9 |