Fabrication of high frequency ZnO thin film SAW devices on silicon substrate with diamond like carbon (DLC) film by RF magnetron sputtering
碩士 === 大同大學 === 光電工程研究所 === 95 === This thesis discusses the fabrication of DLC buffer layer on Si substrate by radio frequency magnetron sputtering. After depositing, we propose a two-steps process to deposit ZnO thin films on DLC/Si, in order to get better (002) orientation and good adherence. We...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/65951280671195507737 |