Investigation of Fabricating Micro/Nano-Structures on CVD Diamond Film by Air Plasma and Reactive Ion Etching
碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 95 === Diamond has many outstanding physical and chemical properties such as extreme hardness, low friction coefficient, high thermal conductivity, high mechanical strength, and high optical transparency. Therefore, several potential applications can be anticipated i...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/30366648231883836401 |