Influence of Surface Integrity of Silicon Substrate on the Growth Mechanisms of Carbon Nanotube

碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 95 === Chemical vapor deposition(CVD)was adopted in this research to synthesize multi-wall carbon nanotubes (MWCNT) where acetylene was used as carbon source and ferrocene-xylene worked as catalyst. Various surface pre-treatments were made on the silicon substrate t...

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Bibliographic Details
Main Authors: Chia-Wei Hsu, 許家偉
Other Authors: Choung-Lii Chao
Format: Others
Language:zh-TW
Published: 2007
Online Access:http://ndltd.ncl.edu.tw/handle/17106661265953046874