Influence of Surface Integrity of Silicon Substrate on the Growth Mechanisms of Carbon Nanotube
碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 95 === Chemical vapor deposition(CVD)was adopted in this research to synthesize multi-wall carbon nanotubes (MWCNT) where acetylene was used as carbon source and ferrocene-xylene worked as catalyst. Various surface pre-treatments were made on the silicon substrate t...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2007
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Online Access: | http://ndltd.ncl.edu.tw/handle/17106661265953046874 |