Sculptured anisotropic optical thin films fabricated by Phisweep technique

• Main Authors: Chia-Feng Lin, 林佳鋒
• Other Authors: 任貽均
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/f5eqak

碩士 === 國立臺北科技大學 === 光電工程系研究所 === 95 === In this work, the Phisweep technique is applied in coating anisotropic films. During the deposition, the periodical sweep of the substrate will break the anisotropic self-shadowing effect that causes inhomogeneous microstructure and improve the fan-out phenomenon. By controlling the deposition angle and the sweep angle, the porosity and columnar tilt angle can be controlled separately. According to the flux vector analysis, the relation between deposition angle , columnar tilt angle and sweep angle can be derived. In experiment, Phisweep technique is applied to prepared anisotropic MgF2 thin films on the BK7 substrate in the thermal coater. The optical constants of the films are measured by polarization conversion reflectance.