Sculptured anisotropic optical thin films fabricated by Phisweep technique
碩士 === 國立臺北科技大學 === 光電工程系研究所 === 95 === In this work, the Phisweep technique is applied in coating anisotropic films. During the deposition, the periodical sweep of the substrate will break the anisotropic self-shadowing effect that causes inhomogeneous microstructure and improve the fan-out phenome...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/f5eqak |