On Mechanical Properties and Wearing Characteristics of Multiple Thin Films
碩士 === 聖約翰科技大學 === 自動化及機電整合研究所 === 95 === Because of its outstanding performance, thin films become more and more important in engineering applications. One of the basic of the thin film technology is to characterize its mechanical properties. In this work, nanoindentation and nanoscratch are utiliz...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/83987579609963829477 |