Theoretical Analysis and Experimental Measurement of Surface Forces between Contacting Surfaces of Microparts

碩士 === 國立虎尾科技大學 === 機械與機電工程研究所 === 95 === With the increasing interest and application in areas such as optical communication, high density storage, green energy and biomedicine, more and more attention is being paid on the research in micro-electromechanical system (MEMS). However, there are seriou...

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Bibliographic Details
Main Authors: Yi- Ming Tan, 戴毅明
Other Authors: Jeng-Haur Horng
Format: Others
Language:zh-TW
Published: 2007
Online Access:http://ndltd.ncl.edu.tw/handle/8em8hk