Study of bimetallic oxide nanocrystal reduced by chemical-vapor-deposition on advancedmicroelectronic devices applications
碩士 === 國立虎尾科技大學 === 機械與機電工程研究所 === 95 === In this thesis, the reduced bimetallic oxide nanocrystal (BONs) embedded in the hafnium oxynitride (HfON) high-k film have been developed by means of the low-temperature chemical-vapor-deposition (CVD) method. The bimetallic acetate solutions were prepared...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/3ecuzh |