Aluminum-nitride codoped zinc oxide films prepared using a radio-frequency magnetron cosputtering system
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 95 === Al-N codoped zinc oxide films were prepared using a radio-frequency magnetron cosputtering system using AlN and ZnO targets at room temperature. The as-deposited cosputtered films at various theoretical atomic ratios [Al / (Al + Zn) at.%] showed n-type condu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/629pgy |